CH.A Timed program
song_pang at yahoo.com
Wed Oct 10 17:46:56 PDT 2001
I have parameter details of CHA Time, will print out
one and attach in the binder. So everyone can check
before using it.
--- Nancy Latta <latta at snf.stanford.edu> wrote:
> It was me who changed the parameters on CH. A TIMED.
> As you might know,
> CH. METAL is frozen, meaning you cannot change
> anything. I was doing an
> etch which did not fit into the 'standard' mold of
> CH.METAL, i,e,. 1um
> Quite honestly, I assumed that everyone was checking
> the parameters of
> each recipe before running them to assure that what
> they wanted was
> there and hence, I've been using CH. A TIMED for
> both timed and endpoint
> True, I should have changed it back, although at
> this point I am not
> sure what the 'correct' parameters would be. Anyone
> else want to weigh
> in on this issue?
> But for goodness sakes, folks, CHECK THE RECIPES
> before you run.
> I agree on the uselessness of the runsheets. Randy,
> do you want to take
> a first pass at what is useful information?
> Randy True wrote:
> > Someone had changed parameters in the CH.A TIMED
> > program. The only values that are to be changed in
> > this program are the time on the Main and Over
> > The Step End Control had been changed to
> > if you want to stop your program using the
> > use the program CH.A METAL, that's what it is for.
> > can still watch the endpoint on CH.A TIMED, that's
> > Endpoint Selection is set to "External Endpoint".
> > gas values in the Over Etch Step were changed.
> > CHANGE THESE VALUES. If you are an experienced
> > and you do change something, make sure you change
> > back to the default vaule. Tie a piece of string
> > around your wafer box, put a piece of tape on your
> > coral card, anything so that you remember. This is
> > very important, you risk messing up other people's
> > work.
> > Another thing about the P5000 I'd like to bring up
> > the log sheets, I don't find them so useful. It
> > doesn't seem necessary to use a whole piece of
> > for each run (ie a standard run), and people do
> > fill the form out uniformly (mainly because the
> > blanks are not clear or not applicable). It seems
> > me that it would make more sense to have a one
> > entry for each "run" and then another section of
> > notebook for recipes and process development.
> > let me know what you think about this.
> > --Randy True
> > true at snf.stanford.edu
> > __________________________________________________
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