P5000etch Ch A status Dec 10

Len Booth booth at snf.stanford.edu
Wed Dec 10 15:14:38 PST 2003


The oil filters that we have been waiting for
have arrived.  Cesar should be able tonight
to see if the backing pump will run normally
with the new filter.  He has suspicions that
there is also a leak somewhere in the etch
chamber, so that will also need to be checked
out before the Metal etch chamber can be
released for everyone to use.
		Len Booth



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