From ebenezerhanjun at sbcglobal.net Fri Apr 9 11:10:29 2004 From: ebenezerhanjun at sbcglobal.net (Han Jun Kim) Date: Fri, 9 Apr 2004 11:10:29 -0700 (PDT) Subject: P5000etch is available for use Message-ID: <20040409181029.96743.qmail@web80407.mail.yahoo.com> Sorry about late notice. Hanjun -------------- next part -------------- An HTML attachment was scrubbed... URL: From rohits at stanford.edu Tue Apr 13 00:22:59 2004 From: rohits at stanford.edu (Rohit Sudhir Shenoy) Date: Tue, 13 Apr 2004 00:22:59 -0700 (PDT) Subject: Ch.A etch rates and selectivity Message-ID: Hi P5000 users, Does anyone have recent etch rates/selectivity numbers for the standard Aluminum etch process (Ch.A.Metal)? I'm specifically looking for oxide etch rates during the main etch and overetch steps. I need to etch 0.5um of Al and stop on 1000A of LTO. I would like to get an idea of how much overetching is permitted by the selectivity. thanks, -- Rohit From rohits at stanford.edu Tue Apr 13 17:49:20 2004 From: rohits at stanford.edu (Rohit Sudhir Shenoy) Date: Tue, 13 Apr 2004 17:49:20 -0700 (PDT) Subject: cancelled reservation from 7:30pm-10pm Message-ID: Wafers not ready since gryphon went down. From ben.jian at arrayedfiberoptics.com Thu Apr 15 19:55:20 2004 From: ben.jian at arrayedfiberoptics.com (ben.jian) Date: Thu, 15 Apr 2004 19:55:20 Subject: machine available from 1-6 PM, wafer not ready Message-ID: <20040415195521.8447.qmail@server266.com> Sorry for the late notice. -------------- next part -------------- An HTML attachment was scrubbed... URL: From han-jun.kim at hp.com Wed Apr 28 10:58:48 2004 From: han-jun.kim at hp.com (Kim, Han-jun) Date: Wed, 28 Apr 2004 10:58:48 -0700 Subject: p5000 is available from 11 am Message-ID: <40700B4C02ABD5119F0000902787664406C018F0@hplex1.hpl.hp.com> ============================= Han-Jun Kim Hewlett-Packard Lab. 1501 Page Mill Rd, MS 1198 Palo Alto, CA 94304 (650) 857-8525 / 8948 FAX hjkim at hpl.hp.com =============================