From ifushman at stanford.edu Thu Oct 7 14:45:02 2004 From: ifushman at stanford.edu (Ilya Fushman) Date: Thu, 7 Oct 2004 14:45:02 -0700 Subject: chamber C qeustion Message-ID: <03d401c4acb6$e6d65cd0$555540ab@BEHEMOTH> Has anyone using chamber C noticed a difference in their recipes after the installation of the new drive? I am concerned about a change in gas flows. Thanks, Ilya Stanford University Ginzton Laboratories Rm 54D Ilya Fushman/ Vuckovic Lab 445 Via Palou Stanford, CA 94305 650 723 2279 - lab 650 804 1058 - cell -------------- next part -------------- An HTML attachment was scrubbed... URL: From mcvittie at snf.stanford.edu Thu Oct 7 15:12:11 2004 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Thu, 07 Oct 2004 15:12:11 -0700 Subject: chamber C qeustion References: <03d401c4acb6$e6d65cd0$555540ab@BEHEMOTH> Message-ID: <4165BF3B.73A52F8E@snf.stanford.edu> Ilya, There have been no changes in the gas flow rates in the std recipes since the tool was first set up. All the std recipes were reloaded into the new drive. New recipes created since the drive had last been backed up were not reloaded. The mass flow controllers (MFCs) had been recalbriated in May. All the MFCs were recalibrated after the new drive were installed. The one exception was CHF3 which has been running about 50% high since before last May. During the recent recalibrations, the CHF3 was set to the same error it has had. We are in the process of doing a characteration of the std oxide etch recipe to see if we should correct the error in the CHF3 flow rates. The expected impact of the higher CHF3 flow on the oxide etch process is lower resist selectivity and profiles close to 90 degree. Since the resist selectivity has been lower than expected ( it is about 2.5) for sometime, I expect that the CHF3 flow has been high for a long time (a number of years). The plan is to have a new oxide etch process with higher resist selectivity but with some profile slope for those users needing high selectivity. Jim McVittie Ilya Fushman wrote: > Has anyone using chamber C noticed a difference in their recipes after > the installation of the new drive? I am concerned about a change in > gas flows.Thanks,Ilya Stanford University > Ginzton Laboratories Rm 54D > Ilya Fushman/ Vuckovic Lab > 445 Via Palou > Stanford, CA 94305 > 650 723 2279 - lab > 650 804 1058 - cell -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: