chamber C qeustion

Ilya Fushman ifushman at stanford.edu
Thu Oct 7 14:45:02 PDT 2004


Has anyone using chamber C noticed a difference in their recipes after the installation of the new drive? I am concerned about a change in gas flows. 
Thanks,
Ilya

Stanford University
Ginzton Laboratories Rm 54D
Ilya Fushman/ Vuckovic Lab
445 Via Palou
Stanford, CA 94305
650 723 2279 - lab
650 804 1058 - cell
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