From rhett.t.brewer at intel.com  Wed Apr 13 11:03:51 2005
From: rhett.t.brewer at intel.com (Brewer, Rhett T)
Date: Wed, 13 Apr 2005 11:03:51 -0700
Subject: Will not make 11:30 tool time
Message-ID: <7F740D512C7C1046AB53446D3720017303B708B1@scsmsx402.amr.corp.intel.com>

Please feel free to use the P5000 at 11:30 - will not make tool time.

Sorry for late notice.

 

Rhettb

 

 

Rhett Brewer

 

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From ankurjn at stanford.edu  Wed Apr 13 16:58:26 2005
From: ankurjn at stanford.edu (Ankur Jain)
Date: Wed, 13 Apr 2005 16:58:26 -0700 (PDT)
Subject: backside protection?
Message-ID: <Pine.LNX.4.44.0504131656500.29305-100000@cardinal2.Stanford.EDU>

Hello p5000 users,
 I want to use p5000 to etch 1.5 um of thermal oxide on a wafer that has
metal features on its backside. I am concerned about whether this might
cause scratches on the backside. If you have tried something like this
before, I would appreciate your sharing your experience with me.

thanks,

Ankur