backside protection?

Ankur Jain ankurjn at stanford.edu
Wed Apr 13 16:58:26 PDT 2005


Hello p5000 users,
 I want to use p5000 to etch 1.5 um of thermal oxide on a wafer that has
metal features on its backside. I am concerned about whether this might
cause scratches on the backside. If you have tried something like this
before, I would appreciate your sharing your experience with me.

thanks,

Ankur





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