HBR leak- Poly etch not available.

Nancy Latta latta at snf.stanford.edu
Tue May 10 10:37:30 PDT 2005


The HBr tank in the toxic vault developed a leak and will take some time 
to repair.

Lampoly is not usable and on shutdown.

P5000etch is in problem status- Chamber C cannot be used for the poly 
program, but the other Chambers are ok to use.

Repair time estimate is 7-10 days.  A message will go out when the 
processes are available to use.


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