HBR leak- Poly etch not available.
latta at snf.stanford.edu
Tue May 10 10:37:30 PDT 2005
The HBr tank in the toxic vault developed a leak and will take some time
Lampoly is not usable and on shutdown.
P5000etch is in problem status- Chamber C cannot be used for the poly
program, but the other Chambers are ok to use.
Repair time estimate is 7-10 days. A message will go out when the
processes are available to use.
More information about the p5000etch