HBr gas status

Dick Crane rcrane at snf.stanford.edu
Tue May 17 16:02:19 PDT 2005


Etch tool users,

The HBr gas source panel and gas cylinder are ready for operation. We 
need to test the gas detection system prior to turn-on. The test is 
scheduled for tomorrow, May 18, between 1000 and 1030. Upon successful 
completion of the test, the tools will be ready for use.

Thanks for your support,

Dick



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