From eenriquez at snf.stanford.edu  Mon Nov  7 11:29:31 2005
From: eenriquez at snf.stanford.edu (Elmer Enriquez)
Date: Mon, 07 Nov 2005 11:29:31 -0800
Subject: HBr panel replacement
Message-ID: <436FAB1B.5070602@snf.stanford.edu>

P5000 and Lampoly users,
    The Lampoly and P5000 (Chamber C only) will be unavailable from 10/5 
@ 7:00am to 10/6 @ 1:00pm so that we can replace and leak check a 
defective HBr panel.  We have some flexibility as far when we replace 
the panel, so let me know if you have an urgent need for these tools.

Regards,
Elmer Enriquez


From eenriquez at snf.stanford.edu  Mon Nov  7 13:04:46 2005
From: eenriquez at snf.stanford.edu (Elmer Enriquez)
Date: Mon, 07 Nov 2005 13:04:46 -0800
Subject: HBr panel replacement
In-Reply-To: <20051107200603.15368.qmail@web54702.mail.yahoo.com>
References: <20051107200603.15368.qmail@web54702.mail.yahoo.com>
Message-ID: <436FC16E.2050302@snf.stanford.edu>

Robin King wrote:

>Hi Elmer,
>
>Could you please let us know what date you mean?  I think you were
>looking at the wrong month.  
>
>Anyway, we have a strong need for the Lam etcher HBr later this
>afternoon, or right after the Nikon comes up, so if you could hold
>off a short while that would be VERY appreciated.  Unless the leak is
>affecting the quality of the gas of course...
>
>Thanks,
>Robin
>
>
>--- Elmer Enriquez <eenriquez at snf.stanford.edu> wrote:
>
>  
>
>>P5000 and Lampoly users,
>>    The Lampoly and P5000 (Chamber C only) will be unavailable from
>>10/5 
>>@ 7:00am to 10/6 @ 1:00pm so that we can replace and leak check a 
>>defective HBr panel.  We have some flexibility as far when we
>>replace 
>>the panel, so let me know if you have an urgent need for these
>>tools.
>>
>>Regards,
>>Elmer Enriquez
>>
>>    
>>
>Sorry,
>  
>
     You're right Robin, its 11/9 @ 7:00am to 11/10 @1:00pm.

Thanks,

Elmer

>
>		
>__________________________________ 
>Yahoo! FareChase: Search multiple travel sites in one click.
>http://farechase.yahoo.com
>  
>



From makarova at stanford.edu  Tue Nov 15 09:21:22 2005
From: makarova at stanford.edu (Maria Makarova)
Date: Tue, 15 Nov 2005 09:21:22 -0800
Subject: Etch rates of PMMA and Oxide
Message-ID: <558B6D5F-A25A-4466-9067-F7B60323731D@stanford.edu>

Hello,

Does anyone have data on etch resistance of 495K PMMA to Oxide etch.  
I need to know through how much oxide I can etch with 300nm PMMA  
mask.  Any suggestions will be appreciated.

Thank you,

Maria Makarova


From elvislin at stanford.edu  Thu Nov 17 14:00:03 2005
From: elvislin at stanford.edu (Elvis Der-Song Lin)
Date: Thu, 17 Nov 2005 14:00:03 -0800
Subject: looking for help with Ti/Al etching in P5000
In-Reply-To: <200510202223.j9KMNNXn018402@smtp1.Stanford.EDU>
Message-ID: <200511172200.jAHLxvHB004400@smtp1.Stanford.EDU>

dear my knowledgeable and experienced friends,

 

I just got trained for P5000 and am the first one from my group trying to
use it to etch Al/Ti on doped poly.

since the good connectivity of the doped poly layer to the underneath
through-wafer-via is extremely critical for the whole device, 

so I'd like to have your suggestion for my first step.

 

for my device, I need to etch 1000A Ti then 0.5 um Al and stop at a 0.5 um
doped poly layer.

I plan to prepare couples of test wafers with the same stack of metals, 

and then look for a suitable recipe which has high selectivity of Al/ Ti to
poly.

 

I appreciate if you have any suggestion for the test run, recipe and
anything else.

thanks a million,

 

-Elvis

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From eenriquez at snf.stanford.edu  Wed Nov 30 08:48:38 2005
From: eenriquez at snf.stanford.edu (Elmer Enriquez)
Date: Wed, 30 Nov 2005 08:48:38 -0800
Subject: NF3 gas cylinder change notice
Message-ID: <438DD7E6.4010402@snf.stanford.edu>

Users,
     The NF3 gas cylinder pressure has hit its change-out limit.  NF3 
will be unavailable from 8 am on 12/1 until 10 am 12/2.

Elmer