HBr panel replacement
Elmer Enriquez
eenriquez at snf.stanford.edu
Mon Nov 7 13:04:46 PST 2005
Robin King wrote:
>Hi Elmer,
>
>Could you please let us know what date you mean? I think you were
>looking at the wrong month.
>
>Anyway, we have a strong need for the Lam etcher HBr later this
>afternoon, or right after the Nikon comes up, so if you could hold
>off a short while that would be VERY appreciated. Unless the leak is
>affecting the quality of the gas of course...
>
>Thanks,
>Robin
>
>
>--- Elmer Enriquez <eenriquez at snf.stanford.edu> wrote:
>
>
>
>>P5000 and Lampoly users,
>> The Lampoly and P5000 (Chamber C only) will be unavailable from
>>10/5
>>@ 7:00am to 10/6 @ 1:00pm so that we can replace and leak check a
>>defective HBr panel. We have some flexibility as far when we
>>replace
>>the panel, so let me know if you have an urgent need for these
>>tools.
>>
>>Regards,
>>Elmer Enriquez
>>
>>
>>
>Sorry,
>
>
You're right Robin, its 11/9 @ 7:00am to 11/10 @1:00pm.
Thanks,
Elmer
>
>
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