HBr panel replacement

Elmer Enriquez eenriquez at snf.stanford.edu
Mon Nov 7 13:04:46 PST 2005


Robin King wrote:

>Hi Elmer,
>
>Could you please let us know what date you mean?  I think you were
>looking at the wrong month.  
>
>Anyway, we have a strong need for the Lam etcher HBr later this
>afternoon, or right after the Nikon comes up, so if you could hold
>off a short while that would be VERY appreciated.  Unless the leak is
>affecting the quality of the gas of course...
>
>Thanks,
>Robin
>
>
>--- Elmer Enriquez <eenriquez at snf.stanford.edu> wrote:
>
>  
>
>>P5000 and Lampoly users,
>>    The Lampoly and P5000 (Chamber C only) will be unavailable from
>>10/5 
>>@ 7:00am to 10/6 @ 1:00pm so that we can replace and leak check a 
>>defective HBr panel.  We have some flexibility as far when we
>>replace 
>>the panel, so let me know if you have an urgent need for these
>>tools.
>>
>>Regards,
>>Elmer Enriquez
>>
>>    
>>
>Sorry,
>  
>
     You're right Robin, its 11/9 @ 7:00am to 11/10 @1:00pm.

Thanks,

Elmer

>
>		
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