Etch rates of PMMA and Oxide

Maria Makarova makarova at stanford.edu
Tue Nov 15 09:21:22 PST 2005


Hello,

Does anyone have data on etch resistance of 495K PMMA to Oxide etch.  
I need to know through how much oxide I can etch with 300nm PMMA  
mask.  Any suggestions will be appreciated.

Thank you,

Maria Makarova



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