looking for help with Ti/Al etching in P5000

[Elvis Der-Song Lin]

dear my knowledgeable and experienced friends,

 

I just got trained for P5000 and am the first one from my group trying to
use it to etch Al/Ti on doped poly.

since the good connectivity of the doped poly layer to the underneath
through-wafer-via is extremely critical for the whole device, 

so I'd like to have your suggestion for my first step.

 

for my device, I need to etch 1000A Ti then 0.5 um Al and stop at a 0.5 um
doped poly layer.

I plan to prepare couples of test wafers with the same stack of metals, 

and then look for a suitable recipe which has high selectivity of Al/ Ti to
poly.

 

I appreciate if you have any suggestion for the test run, recipe and
anything else.

thanks a million,

 

-Elvis

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/p5000etch/attachments/20051117/ad69339a/attachment.html>