From elvislin at stanford.edu Thu Oct 20 15:23:21 2005 From: elvislin at stanford.edu (Elvis Der-Song Lin) Date: Thu, 20 Oct 2005 15:23:21 -0700 Subject: PLEASE PLEASE help with STS etcher footing problem Message-ID: <200510202223.j9KMNNXn018402@smtp1.Stanford.EDU> Hi my knowledgeable and experienced friends, My groupmember and I have a question regarding methods to minimize the footing problem when using the STS ether to etch trenches with oxide as etch stop. I used the "deep" recipe to etch 120 um deep trenches which are 10 um wide. I did about 5 minutes of over etching. After etching, the footing was very severe, especially at places where two trenches cross etch other. The footing was at least 5 um on each side. Is there a recipe that is tuned to miniminze the "footing" problem? Any suggestions will be high appreciated! -Elvis -------------- next part -------------- An HTML attachment was scrubbed... URL: From amf at amfitzgerald.com Thu Oct 20 18:52:03 2005 From: amf at amfitzgerald.com (Alissa M. Fitzgerald) Date: Thu, 20 Oct 2005 18:52:03 -0700 Subject: PLEASE PLEASE help with STS etcher footing problem In-Reply-To: <200510202223.j9KMNNXn018402@smtp1.Stanford.EDU> Message-ID: I'd look into using stsetch2 (talk to Ed Myers - it isn't quite released yet, but maybe you could be among the first to get on it). The footing problem/stopping on oxide has been solved on the newer generations of DRIE tools. Don't waste your time trying to make pigs fly. -Alissa _____ From: Elvis Der-Song Lin [mailto:elvislin at stanford.edu] Sent: Thursday, October 20, 2005 3:23 PM To: stsetch at snf.stanford.edu; p5000etch at snf.stanford.edu Subject: PLEASE PLEASE help with STS etcher footing problem Hi my knowledgeable and experienced friends, My groupmember and I have a question regarding methods to minimize the footing problem when using the STS ether to etch trenches with oxide as etch stop. I used the "deep" recipe to etch 120 um deep trenches which are 10 um wide. I did about 5 minutes of over etching. After etching, the footing was very severe, especially at places where two trenches cross etch other. The footing was at least 5 um on each side. Is there a recipe that is tuned to miniminze the "footing" problem? Any suggestions will be high appreciated! -Elvis -------------- next part -------------- An HTML attachment was scrubbed... URL: