PLEASE PLEASE help with STS etcher footing problem
Elvis Der-Song Lin
elvislin at stanford.edu
Thu Oct 20 15:23:21 PDT 2005
Hi my knowledgeable and experienced friends,
My groupmember and I have a question regarding methods to minimize the
footing problem when using the STS ether to etch trenches with oxide as etch
stop. I used the "deep" recipe to etch 120 um deep trenches which are 10 um
wide. I did about 5 minutes of over etching. After etching, the footing
was very severe, especially at places where two trenches cross etch other.
The footing was at least 5 um on each side. Is there a recipe that is tuned
to miniminze the "footing" problem? Any suggestions will be high
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