From cheng1 at stanford.edu Sat Sep 17 18:46:45 2005 From: cheng1 at stanford.edu (Ching-Hsiang Cheng) Date: Sat, 17 Sep 2005 18:46:45 -0700 Subject: Undercutting of 2um wide 1um thick wires Message-ID: <1127008005.432cc705d862f@webmail.stanford.edu> Dear p5000etch users, I tried to etch 2um wide 1um thick wires by p5000. I used the CH.A METAL ENDPT program to etch approximately 110 sec total. I found there is serious undercut immediately after etch. Is there anyone knows how to solve this problem? Ching-Hsiang From mcvittie at snf.stanford.edu Mon Sep 19 13:37:48 2005 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Mon, 19 Sep 2005 13:37:48 -0700 Subject: Undercutting of 2um wide 1um thick wires References: <1127008005.432cc705d862f@webmail.stanford.edu> Message-ID: <432F219C.7B7C5883@snf.stanford.edu> Ching-Hsiang, The std process should work. I am sure we have done 2um Al in the past. It sound like either you looking at the wrong end point, or there is a problem with the process/tool. 110 sec sounds correct for 2 um of Al.. Here is the process I used when the tool was set up BT Main OE Times 15s 150s 40s press 30 200 200 mT PW 300 450 500 w BCl3 40 40 40 sccm Cl2 10 30 15sccm N2 0 40 20sccm Bfield 0 0 0 The SEM showed no uncut. The etch rate was about 8000A/min. Jim Jim Ching-Hsiang Cheng wrote: > Dear p5000etch users, > > I tried to etch 2um wide 1um thick wires by p5000. I used the CH.A METAL > ENDPT program to etch approximately 110 sec total. I found there is > serious undercut immediately after etch. Is there anyone knows how to > solve this problem? > > Ching-Hsiang -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: