Undercutting of 2um wide 1um thick wires

Ching-Hsiang Cheng cheng1 at stanford.edu
Sat Sep 17 18:46:45 PDT 2005


Dear p5000etch users,

  I tried to etch 2um wide 1um thick wires by p5000.  I used the CH.A METAL
ENDPT program to etch approximately 110 sec total.  I found there is
serious undercut immediately after etch.  Is there anyone knows how to
solve this problem?

Ching-Hsiang




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