nitride etch rate in p5000

Sora Kim kimsora at
Mon Jul 10 10:16:13 PDT 2006

Dear all, 

I am wondering if there is a recipe for nitride with high etch rate as much as 300nm/min. I measured the etch rate of Jim-Nitride. It was about 60-70nm/min. 

Thank you very much. 


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