nitride etch rate in p5000

[Sora Kim]

Dear all, 

I am wondering if there is a recipe for nitride with high etch rate as much as 300nm/min. I measured the etch rate of Jim-Nitride. It was about 60-70nm/min. 

Thank you very much. 

Sora 

 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/p5000etch/attachments/20060710/dd013943/attachment.html>