From jimkruger at yahoo.com  Mon Apr  9 17:08:27 2007
From: jimkruger at yahoo.com (jim kruger)
Date: Mon, 9 Apr 2007 17:08:27 -0700 (PDT)
Subject: Lost a wafer in P5000
Message-ID: <447432.88356.qm@web38914.mail.mud.yahoo.com>

Lost a wafer coing out of Ch.C after etch.

  I did not make the system "red" in case someone who
knows more than I can recover the system before Elmer
gets here in the morning.

sorry,

jimkruger


 
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From cbax at stanford.edu  Fri Apr 27 10:43:02 2007
From: cbax at stanford.edu (cbax at stanford.edu)
Date: Fri, 27 Apr 2007 10:43:02 -0700
Subject: Chamber C offline
Message-ID: <20070427104302.gf9qc0jwhzfo8c84@webmail.stanford.edu>

  To All Users,

  The Cl2 gas cylinder hit low limit trigger alarm, a new bottle
  has been order. Will update as soon as the new bottle is receive.


  Cesar


From jimkruger at yahoo.com  Fri Apr 27 11:36:17 2007
From: jimkruger at yahoo.com (jim kruger)
Date: Fri, 27 Apr 2007 11:36:17 -0700 (PDT)
Subject: Chamber C offline
In-Reply-To: <20070427104302.gf9qc0jwhzfo8c84@webmail.stanford.edu>
Message-ID: <981795.84568.qm@web38905.mail.mud.yahoo.com>

I use Chamber C without Cl2 (HBr+NF3+He-O2).  Can it
be put back on line for this afternoon?

jimkruger
--- cbax at stanford.edu wrote:

>   To All Users,
> 
>   The Cl2 gas cylinder hit low limit trigger alarm,
> a new bottle
>   has been order. Will update as soon as the new
> bottle is receive.
> 
> 
>   Cesar
> 


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