Restricted use of Ch C

Nancy Latta nlatta at
Wed Sep 26 11:47:15 PDT 2007


Chamber C is being put back on line although the Cl is still down.  
Recipes that use both HBr and NH3 may be used.  Do not use HBr without 
NH3 as it will cause particles in the chamber and possibly on your wafers.


More information about the p5000etch mailing list