Restricted use of Ch C

Nancy Latta nlatta at
Wed Sep 26 12:59:53 PDT 2007

Sorry, I meant NF3!

Nancy Latta wrote:

> Folks,
> Chamber C is being put back on line although the Cl is still down.  
> Recipes that use both HBr and NH3 may be used.  Do not use HBr without 
> NH3 as it will cause particles in the chamber and possibly on your 
> wafers.
> -Nancy

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