Restricted use of Ch C

Nancy Latta nlatta at stanford.edu
Wed Sep 26 12:59:53 PDT 2007


Sorry, I meant NF3!

Nancy Latta wrote:

> Folks,
>
> Chamber C is being put back on line although the Cl is still down.  
> Recipes that use both HBr and NH3 may be used.  Do not use HBr without 
> NH3 as it will cause particles in the chamber and possibly on your 
> wafers.
>
> -Nancy
>




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