From elmere at stanford.edu  Wed Apr 23 19:42:02 2008
From: elmere at stanford.edu (Elmer Enriquez)
Date: Wed, 23 Apr 2008 19:42:02 -0700
Subject: P5000etch status
Message-ID: <480FF37A.90409@stanford.edu>

     The current status of the P5000etch tool is:  Ch.C is up,  Ch.B is 
down for the magnet not energizing and Ch.A is down for the wafer lift 
position sensor.  To date, support from Applied Materials field service 
has been abysmal.  During the past two weeks, they have been on site for 
a total of less than 8 hours.  It seems that we are very low on the 
priority list.  Customers with a service contract comes first.  
Management is attempting to move us up the priority list.  I am also 
trying to bring in another contractor who will be able to focus on the 
problems.
    In any case, we believe all the damage has been caused by coolant 
leaking from Chamber A.  So far, we have replaced a hard drive, a 
digital I/O board, a chamber interconnect board and optical sensor 
board.  The system worked briefly after they replaced the interconnect 
board but failed again during testing.  Last time they were here, field 
service noticed unusual voltage readings during their troubleshooting.  
They suspect that the tool might have corroded connectors or a damaged 
wiring harness.
    Field service might be here tonight or tomorrow to work on the system.

Elmer


From mtang at snf.stanford.edu  Mon Apr 28 14:25:42 2008
From: mtang at snf.stanford.edu (Mary Tang)
Date: Mon, 28 Apr 2008 14:25:42 -0700
Subject: Etch Recipes
Message-ID: <481640D6.7040002@snf.stanford.edu>

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)

Thanks,

Your SNF staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From iwjung at stanford.edu  Wed Apr 30 17:03:01 2008
From: iwjung at stanford.edu (Il Woong Jung)
Date: Wed, 30 Apr 2008 17:03:01 -0700
Subject: Etch Recipes
In-Reply-To: <481640D6.7040002@snf.stanford.edu>
Message-ID: <20080501000329.95706272A48@smtp1.stanford.edu>

Mary,

I use the Jim DP Trench recipe, the parameters of which are in the p5000
binder. There was a copy of this recipe named PMEMS which has the same
parameters. 

Il Woong

-----Original Message-----
From: Mary Tang [mailto:mtang at snf.stanford.edu] 
Sent: Monday, April 28, 2008 2:26 PM
To: p5000etch at snf.stanford.edu; Nancy Latta; Elmer Enriquez; michael dickey;
John Shott e; Ed Myers
Subject: Etch Recipes

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)

Thanks,

Your SNF staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu




From robinhmb at yahoo.com  Wed Apr 30 20:13:59 2008
From: robinhmb at yahoo.com (Robin King)
Date: Wed, 30 Apr 2008 20:13:59 -0700 (PDT)
Subject: Etch Recipes, data site
In-Reply-To: <20080501000329.95706272A48@smtp1.stanford.edu>
Message-ID: <516172.86095.qm@web58707.mail.re1.yahoo.com>

You can also check out the data logging site for SNF equipment at:
http://www.lelandstanfordjunior.com

Hundreds of useful recipe results are posted there and you can easily sort parameters and plot for a variety of etch and deposition recipes.   The info is available to community-minded folks who help contribute data.


--- On Wed, 4/30/08, Il Woong Jung <iwjung at stanford.edu> wrote:

> From: Il Woong Jung <iwjung at stanford.edu>
> Subject: RE: Etch Recipes
> To: "'Mary Tang'" <mtang at snf.stanford.edu>, p5000etch at snf.stanford.edu, "'Nancy Latta'" <latta at snf.stanford.edu>, "'Elmer Enriquez'" <eenriquez at snf.stanford.edu>, "'michael dickey'" <mdickey at snf.stanford.edu>, "'John Shott e'" <shott at snf.stanford.edu>, "'Ed Myers'" <edmyers at stanford.edu>
> Date: Wednesday, April 30, 2008, 5:03 PM
> Mary,
> 
> I use the Jim DP Trench recipe, the parameters of which are
> in the p5000
> binder. There was a copy of this recipe named PMEMS which
> has the same
> parameters. 
> 
> Il Woong
> 
> -----Original Message-----
> From: Mary Tang [mailto:mtang at snf.stanford.edu] 
> Sent: Monday, April 28, 2008 2:26 PM
> To: p5000etch at snf.stanford.edu; Nancy Latta; Elmer
> Enriquez; michael dickey;
> John Shott e; Ed Myers
> Subject: Etch Recipes
> 
> Hi everyone --
> 
> We'd like to solicit your help in documenting your
> favorite etch 
> recipes.  Elmer and Mike are testing the system and would
> like to know 
> which recipes are likely to be used (pressure, power, gas
> flows, mag 
> field, etc.)
> 
> Thanks,
> 
> Your SNF staff
> 
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at stanford.edu
> http://snf.stanford.edu


      ____________________________________________________________________________________
Be a better friend, newshound, and 
know-it-all with Yahoo! Mobile.  Try it now.  http://mobile.yahoo.com/;_ylt=Ahu06i62sR8HDtDypao8Wcj9tAcJ