Etch Recipes

Mary Tang mtang at
Mon Apr 28 14:25:42 PDT 2008

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)


Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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