Etch Recipes

[Mary Tang]

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)

Thanks,

Your SNF staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu