Etch Recipes

Il Woong Jung iwjung at
Wed Apr 30 17:03:01 PDT 2008


I use the Jim DP Trench recipe, the parameters of which are in the p5000
binder. There was a copy of this recipe named PMEMS which has the same

Il Woong

-----Original Message-----
From: Mary Tang [mailto:mtang at] 
Sent: Monday, April 28, 2008 2:26 PM
To: p5000etch at; Nancy Latta; Elmer Enriquez; michael dickey;
John Shott e; Ed Myers
Subject: Etch Recipes

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)


Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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