Etch Recipes

Il Woong Jung iwjung at stanford.edu
Wed Apr 30 17:03:01 PDT 2008


Mary,

I use the Jim DP Trench recipe, the parameters of which are in the p5000
binder. There was a copy of this recipe named PMEMS which has the same
parameters. 

Il Woong

-----Original Message-----
From: Mary Tang [mailto:mtang at snf.stanford.edu] 
Sent: Monday, April 28, 2008 2:26 PM
To: p5000etch at snf.stanford.edu; Nancy Latta; Elmer Enriquez; michael dickey;
John Shott e; Ed Myers
Subject: Etch Recipes

Hi everyone --

We'd like to solicit your help in documenting your favorite etch 
recipes.  Elmer and Mike are testing the system and would like to know 
which recipes are likely to be used (pressure, power, gas flows, mag 
field, etc.)

Thanks,

Your SNF staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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