Etch Recipes, data site

Robin King robinhmb at
Wed Apr 30 20:13:59 PDT 2008

You can also check out the data logging site for SNF equipment at:

Hundreds of useful recipe results are posted there and you can easily sort parameters and plot for a variety of etch and deposition recipes.   The info is available to community-minded folks who help contribute data.

--- On Wed, 4/30/08, Il Woong Jung <iwjung at> wrote:

> From: Il Woong Jung <iwjung at>
> Subject: RE: Etch Recipes
> To: "'Mary Tang'" <mtang at>, p5000etch at, "'Nancy Latta'" <latta at>, "'Elmer Enriquez'" <eenriquez at>, "'michael dickey'" <mdickey at>, "'John Shott e'" <shott at>, "'Ed Myers'" <edmyers at>
> Date: Wednesday, April 30, 2008, 5:03 PM
> Mary,
> I use the Jim DP Trench recipe, the parameters of which are
> in the p5000
> binder. There was a copy of this recipe named PMEMS which
> has the same
> parameters. 
> Il Woong
> -----Original Message-----
> From: Mary Tang [mailto:mtang at] 
> Sent: Monday, April 28, 2008 2:26 PM
> To: p5000etch at; Nancy Latta; Elmer
> Enriquez; michael dickey;
> John Shott e; Ed Myers
> Subject: Etch Recipes
> Hi everyone --
> We'd like to solicit your help in documenting your
> favorite etch 
> recipes.  Elmer and Mike are testing the system and would
> like to know 
> which recipes are likely to be used (pressure, power, gas
> flows, mag 
> field, etc.)
> Thanks,
> Your SNF staff
> -- 
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at

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