From nlatta at stanford.edu Thu Dec 11 15:08:35 2008 From: nlatta at stanford.edu (Nancy Latta) Date: Thu, 11 Dec 2008 15:08:35 -0800 Subject: SF6 or CF4 use in Chamber A? Message-ID: <49419D73.6000708@stanford.edu> Folks, In an effort to better serve the etch requests of labmembers we are looking into adding chrome etch capabilities to Chamber A of the p5000. In order to do this we will need to add O2 to the chamber. And in order to do that we will need to use either the CF4 or SF6 mfc. Please let me know if you use either SF6 or CF4 in our recipes for the metal chamber. This survey will be a great help in deciding how we go forward. Thanks, -Nancy From iwjung at stanford.edu Thu Dec 11 21:58:29 2008 From: iwjung at stanford.edu (Il Woong Jung) Date: Thu, 11 Dec 2008 21:58:29 -0800 Subject: Fwd: reservation cancelled 10pm-2am tonight In-Reply-To: <3df4f4ac0812112156m72fda492t827cdcc2c569a1e5@mail.gmail.com> References: <3df4f4ac0812112156m72fda492t827cdcc2c569a1e5@mail.gmail.com> Message-ID: <3df4f4ac0812112158x54012688vd45d6cb07ca9e873@mail.gmail.com> wafers not ready. -- Il Woong Jung PhD --------------------------------- Research Associate E.L. Ginzton Labs 450 Via Palou S31 Stanford, CA 94305 phone: 650-723-9659 fax: 650-725-2533 email: iwjung at stanford.edu -- Il Woong Jung PhD --------------------------------- Research Associate E.L. Ginzton Labs 450 Via Palou S31 Stanford, CA 94305 phone: 650-723-9659 fax: 650-725-2533 email: iwjung at stanford.edu -------------- next part -------------- An HTML attachment was scrubbed... URL: