From rmelamud at stanford.edu  Fri Feb  1 18:26:47 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Fri, 01 Feb 2008 18:26:47 -0800
Subject: p5000: Sun res removed
Message-ID: <20080201182647.qf2xdbj9c4co00co@webmail.stanford.edu>

Removed reservation at 5:30 on sunday


From elmere at stanford.edu  Thu Feb  7 14:06:32 2008
From: elmere at stanford.edu (Elmer Enriquez)
Date: Thu, 07 Feb 2008 14:06:32 -0800
Subject: HBr will be unavailable
Message-ID: <47AB80E8.5070808@stanford.edu>

HBr will be unavailable (used in Ch.C) from 8am tomorrow until 6pm on 
2/13.  We will be replacing a defective HBr MFC on the Lampoly.  We will 
also replace both the gas panel and the purge panel.  Sorry for the 
inconvenience.

Regards,
Elmer


From rmelamud at stanford.edu  Fri Feb  8 11:25:43 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Fri, 08 Feb 2008 11:25:43 -0800
Subject: p5000 res rem at 2:30
Message-ID: <20080208112543.xqukmljdw4cgogww@webmail.stanford.edu>

Litho not ready

-R


From rmelamud at stanford.edu  Mon Feb 11 17:04:29 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Mon, 11 Feb 2008 17:04:29 -0800
Subject: p5000 evening res removed
Message-ID: <20080211170429.u9fvuxci04gswk0g@webmail.stanford.edu>




From rmelamud at stanford.edu  Tue Feb 12 18:22:40 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Tue, 12 Feb 2008 18:22:40 -0800
Subject: p5000 res removed
Message-ID: <20080212182240.veydmrs7284w4w8s@webmail.stanford.edu>

Wafers not ready.

Removed reservations for tonight.
If not ready by tomorrow, will also remove 10am reservation

-R


From kocabas at stanford.edu  Fri Feb 22 20:43:20 2008
From: kocabas at stanford.edu (S. Ekin Kocabas)
Date: Fri, 22 Feb 2008 20:43:20 -0800
Subject: Is P5000 Ch C up?
Message-ID: <47BFA468.4080908@stanford.edu>

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From kocabas at stanford.edu  Fri Feb 22 22:27:34 2008
From: kocabas at stanford.edu (S. Ekin Kocabas)
Date: Fri, 22 Feb 2008 22:27:34 -0800
Subject: P5000 Is Not Operational
Message-ID: <b45e35bf0802222227h179ccc25ka8a9c909281c61a1@mail.gmail.com>

I'm writing from the clean room, all chambers are down. There is a note in
front of P5000 warning that the machine should not be red lighted. A friend
of mine told me that staff has informed AMAT people and even if they come,
Ch C wouldn't be online because its RF generator is configured for Ch B.

I encourage all parties using P5000 to give more extensive information about
the state of the machine, especially to inform those novice users as myself
who lack the expertise to understand the situation with the etcher from
rather technical coral comments.

Ekin

On 2/22/08, S. Ekin Kocabas <kocabas at stanford.edu> wrote:
>
>  Does any one know the status of P5000? I can't tell by looking at Coral.
> I need to use Chamber C. P5000 is yellow lighted and the latest message says
>
> The robot extension position is unknown and will not move the wafer out of
> Chamber B. There should be a wafer on the arm, but not sure. If you mange to
> get it out, it was just a test wafer, so you can toss it. Also, we know it's
> upside down... we were trying to strip nitride off the back of the wafer.
>
>
> I would appreciate if someone with the knowledge could update the list.
>
> Thank you,
>
> Ekin
>
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From rmelamud at stanford.edu  Tue Feb 26 13:55:50 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Tue, 26 Feb 2008 13:55:50 -0800
Subject: p5000 Ch A + res. removed
Message-ID: <20080226135550.orqer719ggkkcwc4@webmail.stanford.edu>

I removed my evening reservation.

Has anyone tried using ChA? Any results?

-R


From nlatta at stanford.edu  Tue Feb 26 15:27:41 2008
From: nlatta at stanford.edu (Nancy Latta)
Date: Tue, 26 Feb 2008 15:27:41 -0800
Subject: p5000 Ch A + res. removed
In-Reply-To: <20080226135550.orqer719ggkkcwc4@webmail.stanford.edu>
References: <20080226135550.orqer719ggkkcwc4@webmail.stanford.edu>
Message-ID: <47C4A06D.2090307@stanford.edu>

Funny you should ask....

I just ran Ch A and Ch C.  In the case of CH A the RF was fine, but I 
had chamber pressure problems.  I was using CHA METAL which calls for 
200mT in ME.  It only got to 179mT.  But the RF was fine.

CH C I ran CH C POLY ETCH and everything was fine.

The endpoint is not working.  I rebooted to no avail.

Btw, all this is in coral as problems or comments. 

Good luck, everyone.

rmelamud at stanford.edu wrote:

> I removed my evening reservation.
>
> Has anyone tried using ChA? Any results?
>
> -R
>



From rmelamud at stanford.edu  Thu Feb 28 15:02:53 2008
From: rmelamud at stanford.edu (rmelamud at stanford.edu)
Date: Thu, 28 Feb 2008 15:02:53 -0800
Subject: p5000 res removed
Message-ID: <20080228150253.lrbl9d1mgwkggow8@webmail.stanford.edu>

Free 5-10.
Reservation after midnight will also be removed.
Sorry for short notice.

-R