p5000 Ch A + res. removed
nlatta at stanford.edu
Tue Feb 26 15:27:41 PST 2008
Funny you should ask....
I just ran Ch A and Ch C. In the case of CH A the RF was fine, but I
had chamber pressure problems. I was using CHA METAL which calls for
200mT in ME. It only got to 179mT. But the RF was fine.
CH C I ran CH C POLY ETCH and everything was fine.
The endpoint is not working. I rebooted to no avail.
Btw, all this is in coral as problems or comments.
Good luck, everyone.
rmelamud at stanford.edu wrote:
> I removed my evening reservation.
> Has anyone tried using ChA? Any results?
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