From ecezhoulj at gmail.com  Fri Mar  7 01:18:04 2008
From: ecezhoulj at gmail.com (Linjie Zhou)
Date: Fri, 7 Mar 2008 01:18:04 -0800
Subject: small sample etching using p5000
Message-ID: <00bf01c88034$28c06010$2201a8c0@ares>

Greetings,

I have some small silicon samples patterned by e-beam lithography.  I would like to use the p5000 to dry etch this sample.  Yet, only 4 inch wafers can be loaded into this machine.  Does anyboday have the experience on how to etch small samples using p5000 (glue it, etc.) ?

Thanks,

Linjie



 

 

 
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/p5000etch/attachments/20080307/a0420e3d/attachment.html>

From tberg at stanford.edu  Tue Mar 25 13:03:31 2008
From: tberg at stanford.edu (Ted Berg)
Date: Tue, 25 Mar 2008 13:03:31 -0700
Subject: [Fwd: FS will be here this afternoon to lookat Chamber a Lifter problem]
Message-ID: <47E95A93.9010801@stanford.edu>



-------- Original Message --------
Subject: 	FS will be here this afternoon to lookat Chamber a Lifter problem
Date: 	Tue, 25 Mar 2008 13:01:23 -0700
From: 	Ted Berg <tberg at stanford.edu>
To: 	p5000 at snf.stanford.edu




-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/p5000etch/attachments/20080325/654608d6/attachment.html>

From tberg at stanford.edu  Thu Mar 27 13:23:40 2008
From: tberg at stanford.edu (Ted Berg)
Date: Thu, 27 Mar 2008 13:23:40 -0700
Subject: System update
Message-ID: <47EC024C.7050804@stanford.edu>

Field service is securing another hard drive and it should arrive 
tomorrow then they have to rebuild it. Wish them luck.


From ofidaner at yahoo.com  Fri Mar 28 18:47:43 2008
From: ofidaner at yahoo.com (Onur Fidaner)
Date: Fri, 28 Mar 2008 18:47:43 -0700 (PDT)
Subject: Al etch / alternative to p5000
Message-ID: <771175.39848.qm@web56109.mail.re3.yahoo.com>

Dear p5000 users,

I need to etch ~ 750 nm Al on silicon andunfortunately ChA has been down for some time.  Do you know of anylocal vendor that can provide service for Al and Ti plasma etching?

Thank you,

Onur



      ____________________________________________________________________________________
Like movies? Here's a limited-time offer: Blockbuster Total Access for one month at no cost. 
http://tc.deals.yahoo.com/tc/blockbuster/text4.com