Ch C cleans to avoid wafer sticking

Nancy Latta nlatta at stanford.edu
Wed Jun 9 11:24:53 PDT 2010


(I apologize for any duplicate messages you may be getting on this- I 
want to make sure it is seen by all)

Folks,
An in-situ clean and seasoning of the chamber is recommended before you 
commit your valuable wafer to the etch.  Here is the procedure;
Run the recipe CH.C CLEAN for 300s on a blank dummy wafer followed by at 
least 120s of the recipe you will be using.
This is recommended to clean the clamp fingers and reduce the chance of 
you wafers sticking to the clamp.





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