particles issues of p5000

Shu-Lu Chen shuluc at stanford.edu
Tue May 4 16:22:55 PDT 2010


Hi,

Is there anyone with the experience of using chamber A to etch Al/Si on top of Ge surface ?
We found some particles after the Al/Si etch and are wondering what those particles could be.
Thanks for any information.
Best,

Erik




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