From eperalta at stanford.edu  Tue Aug  2 16:24:33 2011
From: eperalta at stanford.edu (Edgar Peralta)
Date: Tue, 2 Aug 2011 16:24:33 -0700
Subject: Status of chamber B?
Message-ID: <CAPwL1NqpOcGFwe7N1YUK_N6m5O_we7AwZhQ01Vsg8hBq7AFzYw@mail.gmail.com>

I was wondering if anyone knew the status of Ch. B?

Yesterday it wasn't processing due to some He supply problem, Cesar was
going to come in this afternoon.

Still looks the same in Coral but I've seen it get enabled (could be for the
other chambers). Is Ch. B it working now?

Thanks,

Edgar
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From eperalta at stanford.edu  Wed Aug  3 13:52:39 2011
From: eperalta at stanford.edu (Edgar Peralta)
Date: Wed, 3 Aug 2011 13:52:39 -0700
Subject: status of P5000?
Message-ID: <CAPwL1No3JLnCuVaWg=hnm0K413Qayq+5RKwpC9jOx-9uvc3+-g@mail.gmail.com>

Hi Cathy,

I noticed you used P5000 Ch. B earlier today after they fixed the He problem
but you still were not able to process your wafers according to the comment
on Coral? Did you contact any of the maintenance guys? I'm curious as to
what the status is.

Thanks,

Edgar
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From ehsans at stanford.edu  Wed Aug  3 14:46:13 2011
From: ehsans at stanford.edu (Ehsan Sadeghipour)
Date: Wed, 3 Aug 2011 14:46:13 -0700
Subject: status of P5000?
In-Reply-To: <CAPwL1No3JLnCuVaWg=hnm0K413Qayq+5RKwpC9jOx-9uvc3+-g@mail.gmail.com>
References: <CAPwL1No3JLnCuVaWg=hnm0K413Qayq+5RKwpC9jOx-9uvc3+-g@mail.gmail.com>
Message-ID: <CAPx=s19Mt2af9QgWf2j-8w7dnRcFNgCJoR1xQ_-nHRgO9=PdfA@mail.gmail.com>

I am currently running chamber C and I do not have any issues.

Ehsan




On Wed, Aug 3, 2011 at 1:52 PM, Edgar Peralta <eperalta at stanford.edu> wrote:

> Hi Cathy,
>
> I noticed you used P5000 Ch. B earlier today after they fixed the He
> problem but you still were not able to process your wafers according to the
> comment on Coral? Did you contact any of the maintenance guys? I'm curious
> as to what the status is.
>
> Thanks,
>
> Edgar
>
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From ysohn at stanford.edu  Wed Aug 31 12:09:10 2011
From: ysohn at stanford.edu (Young Ik Sohn)
Date: Wed, 31 Aug 2011 12:09:10 -0700 (PDT)
Subject: p5000 Si anisotropic etch recipe
In-Reply-To: <1120845985.1779668.1314817499269.JavaMail.root@zm08.stanford.edu>
Message-ID: <929605166.1779893.1314817750764.JavaMail.root@zm08.stanford.edu>

Hi labmembers,

Can anybody recommend p5000 single crystal Si anisotropic etch recipe having a good vertical profile?
Etch target is about 3 um.

Thank you,
Young Ik Sohn