From mtang at stanford.edu  Tue May 10 13:02:06 2011
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 10 May 2011 13:02:06 -0700
Subject: No Cl2 or HBr on Wednesday, May 11
Message-ID: <4DC999BE.5020707@stanford.edu>

Hi all --

Repairs of exhaust ductwork is scheduled for Wednesday, May 11, from 
6:30 am to 4:30 pm.  This requires that we shut down our Cl2 and HBr 
supply cylinders.  Lampoly is down for other reasons, but will remain 
down Wednesday regardless.  P5000etch and Pquest will remain up, but 
only for processes not requiring chlorine or hydrogen bromide.  This 
work should not otherwise affect these systems.

Thanks for your attention --

Your SNF staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu