No Cl2 or HBr on Wednesday, May 11

Mary Tang mtang at
Tue May 10 13:02:06 PDT 2011

Hi all --

Repairs of exhaust ductwork is scheduled for Wednesday, May 11, from 
6:30 am to 4:30 pm.  This requires that we shut down our Cl2 and HBr 
supply cylinders.  Lampoly is down for other reasons, but will remain 
down Wednesday regardless.  P5000etch and Pquest will remain up, but 
only for processes not requiring chlorine or hydrogen bromide.  This 
work should not otherwise affect these systems.

Thanks for your attention --

Your SNF staff

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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