From mtang at stanford.edu Tue Nov 1 10:36:06 2011 From: mtang at stanford.edu (Mary Tang) Date: Tue, 01 Nov 2011 10:36:06 -0700 Subject: BCl3 replacement Message-ID: <4EB02E06.3000504@stanford.edu> Hi all -- Apologies for the short notice. As you know, after much cycle purging the BCl3 cylinder installed a few weeks ago had finally been qualified for the standard P5000 metal etch, but because of the earlier issues, we've had some lingering doubts about its integrity. A replacement cylinder has arrived and will be/is being changed out today. The gas line and tool manifolds will be purged of existing gas, just to be sure. A metal etch qualification will be run in p5000etch and this will qualify the cylinder. We do not have a formal qual procedure for the pquest, so pquest users' feedback would be appreciated. For pquest users, there's a regular chamber clean scheduled for this Friday morning which should reset things back to as good as we know; if the pquest user community needs a clean sooner, let us know. Lastly, there's always the possibility that this new cylinder has problems. After all the discussions with our suppliers, I hope to goodness not, but their recent performance leaves something to be desired -- we will keep you posted. Thanks for your attention -- Team Etch From mtang at stanford.edu Tue Nov 1 16:47:47 2011 From: mtang at stanford.edu (Mary Tang) Date: Tue, 01 Nov 2011 16:47:47 -0700 Subject: BCl3 Update Message-ID: <4EB08523.4080506@stanford.edu> Hi all -- Apologies again, as the BCl3 will be delayed a day. The cylinder has been changed, but not yet turned on. There are two ways to check for connection integrity: one way is to use the helium sniffer, which is quick; the other is a 24 hour static pressure check, which is much longer but more complete/definitive. For various reasons, we elected to choose the second. BCl3 should be turned back on and ready for qualification tomorrow afternoon. Thanks for your patience -- Team Etch From qran at stanford.edu Tue Nov 1 19:32:23 2011 From: qran at stanford.edu (Qiushi (Helen) Ran) Date: Tue, 1 Nov 2011 19:32:23 -0700 (PDT) Subject: p5000 time release (9am and 11am, 11/02) Message-ID: <1107834061.2424451.1320201143487.JavaMail.root@zm04.stanford.edu> took an early session. Qiushi(Helen) Ran ========================================= Department of Electrical Engineering Stanford University, Stanford, CA 94305. Mobile: +1-650-796-1439 Email: qran at stanford.edu From nlatta at stanford.edu Wed Nov 2 17:24:39 2011 From: nlatta at stanford.edu (Nancy Latta) Date: Wed, 02 Nov 2011 17:24:39 -0700 Subject: BCl3 back on Message-ID: <4EB1DF47.6050207@stanford.edu> Hi Everyone, We just wanted to let you know that the BCl3 is operational. We qualified the Al etch process on the p5000etch. Qualification has not been done on the pquest, but we are confident the the new cylinder of BCl3 is fine. Please let us know if you notice any problems. -Team Etch From tasyurek at stanford.edu Thu Nov 10 12:39:06 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Thu, 10 Nov 2011 12:39:06 -0800 (PST) Subject: p5000etch free 1-2pm today Message-ID: <354207975.2122201.1320957546161.JavaMail.root@zm02.stanford.edu> Sorry for the late notice From tgwinn at stanford.edu Fri Nov 11 08:06:42 2011 From: tgwinn at stanford.edu (Thomas Gwinn) Date: Fri, 11 Nov 2011 08:06:42 -0800 Subject: Reservation released, 9-11 AM Message-ID: Sample not ready yet -------------- next part -------------- An HTML attachment was scrubbed... URL: From wangss at stanford.edu Fri Nov 11 12:33:08 2011 From: wangss at stanford.edu (Shasha Wang) Date: Fri, 11 Nov 2011 12:33:08 -0800 Subject: free from 4:30 to 7:30pm Message-ID: Wafers are not ready due to ASML failure. ------------------- Shasha Wang PhD Candidate Electrical Engineering Department Stanford Micro Structures and Sensors Lab Stanford University, California, USA From chienyuc at stanford.edu Tue Nov 22 12:31:03 2011 From: chienyuc at stanford.edu (Chien-Yu Chen) Date: Tue, 22 Nov 2011 12:31:03 -0800 (PST) Subject: reservation released 11/22 (today) 12:30-1:30 Message-ID: <385194849.12666.1321993863221.JavaMail.root@zm03.stanford.edu> Finished early. No obvious problem in Ch.A etching after coming back from shutdown. From eperalta at stanford.edu Wed Nov 23 14:54:03 2011 From: eperalta at stanford.edu (Edgar Peralta) Date: Wed, 23 Nov 2011 14:54:03 -0800 Subject: is Ch. B working? Message-ID: Hi all, Did anyone use Ch. B successfully today? I'm just wondering if it was fixed but maybe just not updated on coral... -- Edgar A. Peralta Ph.D. Candidate,?Stanford University Department of Applied Physics M: 954.940.2700 From sclaussen at stanford.edu Mon Nov 28 18:49:30 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Mon, 28 Nov 2011 18:49:30 -0800 Subject: p5000 available tonight, 11pm-midnight Message-ID: From simba85 at gmail.com Mon Nov 28 19:29:33 2011 From: simba85 at gmail.com (Joo Yong Sim) Date: Mon, 28 Nov 2011 19:29:33 -0800 Subject: p5000 available tonight, 9pm-10pm Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From sclaussen at stanford.edu Tue Nov 29 17:16:04 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 29 Nov 2011 17:16:04 -0800 Subject: p5000 available Weds morning, 8:30-10:30am Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From tasyurek at stanford.edu Tue Nov 29 17:24:26 2011 From: tasyurek at stanford.edu (Emel Tasyurek) Date: Tue, 29 Nov 2011 17:24:26 -0800 (PST) Subject: p5000 free tomorrow 6:30-8:30am Message-ID: <2054271855.471404.1322616266834.JavaMail.root@zm02.stanford.edu> No longer needed. From wonux at stanford.edu Wed Nov 30 03:37:22 2011 From: wonux at stanford.edu (Wonuk Jo) Date: Wed, 30 Nov 2011 03:37:22 -0800 (PST) Subject: released from 8:30am to 10:30am Message-ID: <429289603.163256.1322653041981.JavaMail.root@zm03.stanford.edu> wafer not ready. sorry for the late notice. Josh Wonuk Jo Graduate Student Electrical Engineering Stanford University 919-279-0638 -- We live by faith, not by sight