BCl3 back on

Nancy Latta nlatta at stanford.edu
Wed Nov 2 17:24:39 PDT 2011


Hi Everyone,

We just wanted to let you know that the BCl3 is operational.  We 
qualified the Al etch process on the p5000etch.  Qualification has not 
been done on the pquest, but we are confident the the new cylinder of 
BCl3 is fine.

Please let us know if you notice any problems.

-Team Etch



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