From sclaussen at stanford.edu Tue Oct 4 15:34:56 2011 From: sclaussen at stanford.edu (Stephanie Claussen) Date: Tue, 4 Oct 2011 15:34:56 -0700 Subject: p5000 available tonight, 9pm-midnight Message-ID: -------------- next part -------------- An HTML attachment was scrubbed... URL: From qran at stanford.edu Wed Oct 5 21:55:26 2011 From: qran at stanford.edu (Qiushi (Helen) Ran) Date: Wed, 5 Oct 2011 21:55:26 -0700 (PDT) Subject: P5000 available Friday 10am to 11:30am Message-ID: <366397870.1282841.1317876926714.JavaMail.root@zm04.stanford.edu> Qiushi(Helen) Ran ========================================= Department of Electrical Engineering Stanford University, Stanford, CA 94305. Mobile: +1-650-796-1439 Email: qran at stanford.edu From eperalta at stanford.edu Thu Oct 6 02:10:45 2011 From: eperalta at stanford.edu (Edgar Peralta) Date: Thu, 6 Oct 2011 02:10:45 -0700 Subject: please report your tool problems on coral! Message-ID: Hi Stella, Please document your tool problems on CORAL! (...and not on a piece of paper taped to the tool) A CORAL report sends an e-mail to the staff in charge so they can diagnose/solve the problem. It also lets those users not in lab know that they shouldn't waste their time going to the lab if the tool they need isn't working. Thanks, -- *Edgar A. Peralta * *Ph.D. Candidate, *Stanford University Department of Applied Physics *M*: 954.940.2700 -------------- next part -------------- An HTML attachment was scrubbed... URL: From wangss at stanford.edu Thu Oct 6 09:43:38 2011 From: wangss at stanford.edu (Shasha Wang) Date: Thu, 6 Oct 2011 09:43:38 -0700 (PDT) Subject: Reservation released 11-13:00 Message-ID: <1053953499.2108940.1317919418867.JavaMail.root@zm06.stanford.edu> wafers are not ready. From jpmailoa at MIT.EDU Wed Oct 12 05:37:09 2011 From: jpmailoa at MIT.EDU (Jonathan P Mailoa) Date: Wed, 12 Oct 2011 08:37:09 -0400 Subject: p5000 available today 2-4pm Message-ID: <20111012083709.c65r1mwz4sssc48c@webmail.mit.edu> Jonathan From mtang at stanford.edu Wed Oct 12 16:14:45 2011 From: mtang at stanford.edu (Mary Tang) Date: Wed, 12 Oct 2011 16:14:45 -0700 Subject: p5000etch and pquest updates Message-ID: <4E961F65.8090500@stanford.edu> Hi all -- Just so you know.... It's been determined that the BCl3 bottle installed just last week really isn't BCl3. The etches were bad and the plasma color is off. We're trying to expedite another bottle. It appears that our supplier has undergone some organizational changes and is subcontracting their etch gases -- this is the third etch cylinder in the last three months we've received that has been bad. Needless to say, there will be measures taken. We will update everyone as we learn more. In the meantime, Elmer and Cesar have removed the turbocontroller from p5000etch ChA (since there is no BCl3) and placed it on ChB to get that up and running. A new turbocontroller is expected any day, though probably moot until we get some BCl3. Our apologies -- Team Etch (Elmer, Cesar, Nancy, Mary) -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From cfchiang at stanford.edu Wed Oct 12 20:56:21 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Wed, 12 Oct 2011 20:56:21 -0700 (PDT) Subject: p5000 free tomorrow 9-11am Message-ID: <63259523.2311967.1318478181063.JavaMail.root@zm06.stanford.edu> An HTML attachment was scrubbed... URL: From mtang at stanford.edu Fri Oct 14 14:27:27 2011 From: mtang at stanford.edu (Mary Tang) Date: Fri, 14 Oct 2011 14:27:27 -0700 Subject: BCl3 status on P5000etch and pquest Message-ID: <4E98A93F.3070500@stanford.edu> Hi all -- BCl3 has been turned back on P5000etch and Pquest. No, this is not the new cylinder, which is still in transit from the East Coast (no delivery date as yet). This is the same cylinder which we received and found to be contaminated. BCl3 is a low vapor pressure liquid source (4.4 psig) and we were able to determine that the cylinder appears to have been charged with an apparently innocuous gas. Elmer did extensive pumping on the cylinder to flush the gas and purged the gas lines. The plasma has returned to a normal color and Nancy's Al etch rate qual on p5000etch now looks really good. Full disclosure: by available measures, the BCl3 appears to be OK. However, this experience leaves some concern about the integrity of this cylinder, so we still plan to replace this cylinder with the new one when it arrives, to put any lingering doubts to rest. Please make sure to run a test sample before committing your own material to a critical etch. Please also report any issues on Coral. And by the way, P5000etch users: ChA is back online with a replacement turbo controller. Thanks for your attention and patience -- Team Etch -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From cfchiang at stanford.edu Mon Oct 17 15:45:50 2011 From: cfchiang at stanford.edu (Chia-Fang Chiang) Date: Mon, 17 Oct 2011 15:45:50 -0700 (PDT) Subject: p5000 free today 5-7pm Message-ID: <1865768615.2445987.1318891550079.JavaMail.root@zm06.stanford.edu> -------------- next part -------------- An HTML attachment was scrubbed... URL: From qran at stanford.edu Wed Oct 26 16:44:35 2011 From: qran at stanford.edu (Qiushi (Helen) Ran) Date: Wed, 26 Oct 2011 16:44:35 -0700 (PDT) Subject: wavelength for Poly-Si over SiN endpoint detection in P5000 Message-ID: <1739470496.2174829.1319672675904.JavaMail.root@zm04.stanford.edu> Hi, all Does anyone know the wavelength used for Poly-Si over SiN endpoint detection in P5000? Any suggestions are welcomed. Thanks, Helen Qiushi(Helen) Ran ========================================= Department of Electrical Engineering Stanford University, Stanford, CA 94305. Mobile: +1-650-796-1439 Email: qran at stanford.edu From mtang at stanford.edu Mon Oct 31 09:53:22 2011 From: mtang at stanford.edu (Mary Tang) Date: Mon, 31 Oct 2011 09:53:22 -0700 Subject: Tie in done, today's reservation released Message-ID: <4EAED282.8050000@stanford.edu> -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu