Metal and Dielectric Etch Discussion

Ed Myers edmyers at
Tue Dec 4 10:04:20 PST 2012


Thank you for those who attended.  For those who did not, please review 
the attached meeting minutes.


On 11/26/2012 9:48 AM, Ed Myers wrote:
> All,
> I would like to meet at 10am on Monday, Dec. 3rd in 101 Allen to 
> discuss the PlasmaTherm metal and dielectric etch systems.  As many of 
> you know the PlasmaTherm DRIE system has completed it's acceptance.  
> This means, it is now available for process characterization.  I would 
> like to meet with the etch community to discuss the process needs for 
> the PlasmaTherm systems.
> Please come to discuss your process needs and what needs to happen on 
> the PlasmaTherm systems.  If you know anyone who needs etches that 
> have not been supported in the past, please make sure they are invited.
> Regards,
> Ed

-------------- next part --------------
A non-text attachment was scrubbed...
Name: Metal and Dielectric Meeting 12-3-12.docx
Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
Size: 29573 bytes
Desc: not available
URL: <>

More information about the p5000etch mailing list