From cachang at stanford.edu  Thu Mar  8 11:01:13 2012
From: cachang at stanford.edu (Chia-Ming Chang)
Date: Thu, 8 Mar 2012 11:01:13 -0800 (PST)
Subject: Deep silicon etch
In-Reply-To: <1413963557.21051412.1331232302769.JavaMail.root@zm06.stanford.edu>
Message-ID: <1039113793.21098948.1331233273431.JavaMail.root@zm06.stanford.edu>

Dear labmembers,

I am wondering if you have experience on deep anisotropic silicon etch in p5000. 

My structures are rectangles:
1. 1.4um x 5mm
2. many 0.4um x 1um

I plan to use oxide as a hard mask, and to etch into silicon for 10um if possible. DRIE could be another option, but I would like to avoid scallop if p5000 or lampoly works.

Thanks for your suggestions, comments, recipes and experience.
Chia-Ming


From nlatta at stanford.edu  Tue Mar 13 13:52:51 2012
From: nlatta at stanford.edu (Nancy Latta)
Date: Tue, 13 Mar 2012 13:52:51 -0700
Subject: No Cl or HBr on Wed and Thurs
Message-ID: <4F5FB3A3.6060007@stanford.edu>

Labmembers,

Cl and HBr will not be available to the etchers starting 6:00am Wed 
until 12:00pm on Thurs.  This will allow for repairs on the corrosives 
vault in the gas bunker.

If there is any change in this schedule we will notify you.

Team Etch


From mtang at stanford.edu  Tue Mar 20 14:33:39 2012
From: mtang at stanford.edu (Mary Tang)
Date: Tue, 20 Mar 2012 14:33:39 -0700
Subject: Chlorine and HBr shutdown, Thur am-Fri noon
Message-ID: <4F68F7B3.3040004@stanford.edu>

Dear pquest-, p5000etch- and lampoly- users --

The duct work in the corrosives gas vault has been rescheduled.  So 
please be aware that from Thursday morning through Friday around noon, 
chlorine and hydrogen bromide will be unavailable.  I've reserved the 
tools, just to flag this, but tools should be otherwise usable for other 
chemistries.

Thanks for your attention and apologies for the inconvenience --

Your SNF Staff

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu