Deep silicon etch

Chia-Ming Chang cachang at stanford.edu
Thu Mar 8 11:01:13 PST 2012


Dear labmembers,

I am wondering if you have experience on deep anisotropic silicon etch in p5000. 

My structures are rectangles:
1. 1.4um x 5mm
2. many 0.4um x 1um

I plan to use oxide as a hard mask, and to etch into silicon for 10um if possible. DRIE could be another option, but I would like to avoid scallop if p5000 or lampoly works.

Thanks for your suggestions, comments, recipes and experience.
Chia-Ming



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