Deep silicon etch
cachang at stanford.edu
Thu Mar 8 11:01:13 PST 2012
I am wondering if you have experience on deep anisotropic silicon etch in p5000.
My structures are rectangles:
1. 1.4um x 5mm
2. many 0.4um x 1um
I plan to use oxide as a hard mask, and to etch into silicon for 10um if possible. DRIE could be another option, but I would like to avoid scallop if p5000 or lampoly works.
Thanks for your suggestions, comments, recipes and experience.
More information about the p5000etch