From edmyers at stanford.edu  Thu Sep  6 16:14:26 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Thu, 06 Sep 2012 16:14:26 -0700
Subject: BCl3 Heat Trace Tie-In
Message-ID: <50492E52.5040707@stanford.edu>

All,

In order to complete the installation of the BCl3 to the new etchers we 
need to tie-in to the piping heat trace system.  While we expect this to 
be very quick (<30min) and not noticeable at the tool, we want to give 
everyone a warning.  The tie-in is scheduled for Friday, Sept. 7th at 
2pm.  If you are running a BCl3 etch recipe, you may want to keep a 
careful eye on the BCl3 flow or be more cautious and reschedule you 
equipment reservation.

I made a blocking reservation on the P5000etch system and I will contact 
the person with a reservation on the pquest to discuss the process in 
more detail

Regards,
Ed Myers


From edmyers at stanford.edu  Fri Sep  7 14:40:00 2012
From: edmyers at stanford.edu (Ed Myers)
Date: Fri, 07 Sep 2012 14:40:00 -0700
Subject: BCl3 Heat Trace Tie-In
In-Reply-To: <50492E52.5040707@stanford.edu>
References: <50492E52.5040707@stanford.edu>
Message-ID: <504A69B0.2070006@stanford.edu>

All,

The tie-in has been completed.  We observed a 1 degree F temperature 
drop during the tie-in.  This should not have caused any concerns, but 
please monitor your gas flows as always.

Regards,
Ed

On 9/6/2012 4:14 PM, Ed Myers wrote:
> All,
>
> In order to complete the installation of the BCl3 to the new etchers 
> we need to tie-in to the piping heat trace system.  While we expect 
> this to be very quick (<30min) and not noticeable at the tool, we want 
> to give everyone a warning.  The tie-in is scheduled for Friday, Sept. 
> 7th at 2pm.  If you are running a BCl3 etch recipe, you may want to 
> keep a careful eye on the BCl3 flow or be more cautious and reschedule 
> you equipment reservation.
>
> I made a blocking reservation on the P5000etch system and I will 
> contact the person with a reservation on the pquest to discuss the 
> process in more detail
>
> Regards,
> Ed Myers