From pengyu.fan at gmail.com  Wed Feb  6 16:29:39 2013
From: pengyu.fan at gmail.com (Pengyu Fan)
Date: Wed, 6 Feb 2013 16:29:39 -0800
Subject: [p5000etch] Poly etching profile
In-Reply-To: <CADPrSwwqu8Wc6Av5OWi1AiVypRV2pHNndihKMaD5JmHZwt_fyA@mail.gmail.com>
References: <CADPrSwwqu8Wc6Av5OWi1AiVypRV2pHNndihKMaD5JmHZwt_fyA@mail.gmail.com>
Message-ID: <CADPrSwxn37dGTDgt=eTqxs4EEqo8sKQnh-YmjxjMH-E-S2B+4A@mail.gmail.com>

Hi All,

I'm trying to etch 100nm poly Si deposited by thermcopoly with standard
poly etching recipe (no over etch), and have been getting quite rough and
non-uniform etching profile.

I'm wondering if anyone has any experience of getting very smooth poly Si
sidewalls from the tool?

Thank you!

Pengyu
---------- Forwarded message ----------
From: "Pengyu Fan" <fanpy839 at stanford.edu>
Date: Feb 6, 2013 4:27 PM
Subject: Poly etching profile
To: <p5000 at snf.stanford.edu>
Cc:


Hi All,

I'm trying to etch 100nm poly Si deposited by thermcopoly with standard
poly etching recipe (no over etch), and have been getting quite rough and
non-uniform etching profile.

I'm wondering if anyone has any experience of getting very smooth poly Si
sidewalls from the tool?

Thank you!
Pengyu
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From marina.radulaski at stanford.edu  Tue Feb 26 15:10:07 2013
From: marina.radulaski at stanford.edu (Marina Radulaski)
Date: Tue, 26 Feb 2013 15:10:07 -0800 (PST)
Subject: [p5000etch] CH.C POLY PC has been changed
In-Reply-To: <1945312100.15130144.1361919999944.JavaMail.root@stanford.edu>
Message-ID: <888092623.15139154.1361920207923.JavaMail.root@stanford.edu>

Hi P5000 users,

by accident, CH.C POLY PC has been significantly changed this morning. If you are an active user of this recipe, please contact me at marina01 at stanford.edu to help retrieve the correct gases.

Thank you,
Marina