[p5000etch] Poly etching profile

Pengyu Fan pengyu.fan at gmail.com
Wed Feb 6 16:29:39 PST 2013


Hi All,

I'm trying to etch 100nm poly Si deposited by thermcopoly with standard
poly etching recipe (no over etch), and have been getting quite rough and
non-uniform etching profile.

I'm wondering if anyone has any experience of getting very smooth poly Si
sidewalls from the tool?

Thank you!

Pengyu
---------- Forwarded message ----------
From: "Pengyu Fan" <fanpy839 at stanford.edu>
Date: Feb 6, 2013 4:27 PM
Subject: Poly etching profile
To: <p5000 at snf.stanford.edu>
Cc:


Hi All,

I'm trying to etch 100nm poly Si deposited by thermcopoly with standard
poly etching recipe (no over etch), and have been getting quite rough and
non-uniform etching profile.

I'm wondering if anyone has any experience of getting very smooth poly Si
sidewalls from the tool?

Thank you!
Pengyu
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