From popomoo at stanford.edu  Thu Jan 31 01:01:22 2013
From: popomoo at stanford.edu (Sangmoo Jeong)
Date: Thu, 31 Jan 2013 01:01:22 -0800 (PST)
Subject: [p5000etch] [p5000] Si isotropic etching recipe
Message-ID: <430684495.9490258.1359622882162.JavaMail.root@stanford.edu>

Dear p5000 users

If you have done Si isotropic etching with SiO2 mask in p5000, could you share the recipe??

There is one recipe "POLY ISO", but it didn't work.
Thanks in advance.