[p5000etch] [p5000] Si isotropic etching recipe

Sangmoo Jeong popomoo at stanford.edu
Thu Jan 31 01:01:22 PST 2013


Dear p5000 users

If you have done Si isotropic etching with SiO2 mask in p5000, could you share the recipe??

There is one recipe "POLY ISO", but it didn't work.
Thanks in advance.



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