From gigi at snf.stanford.edu  Mon Dec  4 03:50:26 2000
From: gigi at snf.stanford.edu (gigi at snf.stanford.edu)
Date: Dec 4, 2000 3:50:26 PM
Subject: Shutdown pquest: wafer broken inside
Message-ID: <mailman.32.1357938558.25846.pquest-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Tue Dec  5 09:04:29 2000
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Dec 5, 2000 9:04:29 PM
Subject: Shutdown pquest: wafer broken inside
Message-ID: <mailman.33.1357938559.25846.pquest-pcs@snf.stanford.edu>

cleaned up broken wafer inside the chamber and
transfer wafer 10x without a problem..



From booth at snf.stanford.edu  Wed Dec  6 09:13:14 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 6, 2000 9:13:14 AM
Subject: Shutdown pquest: Shutdown to test wafer transport.
Message-ID: <mailman.34.1357938559.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Dec 15 03:17:25 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Dec 15, 2000 3:17:25 PM
Subject: Shutdown pquest 2000-12-06 09:11:49: Shutdown to test wafer transport.
Message-ID: <mailman.35.1357938559.25846.pquest-pcs@snf.stanford.edu>

Gigi tested the wafer transport - it works OK now.
He also tested a full recipe - it works again too.
I'm clearing ;the shutdown now.