Shutdown pquest 2000-12-06 09:11:49: Shutdown to test wafer transport.

booth at snf.stanford.edu booth at snf.stanford.edu
Fri Dec 15 03:17:25 PST 2000


Gigi tested the wafer transport - it works OK now.
He also tested a full recipe - it works again too.
I'm clearing ;the shutdown now.




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