From aykutlu at loki.stanford.edu  Wed Jul  5 16:25:19 2000
From: aykutlu at loki.stanford.edu (Aykutlu Dana)
Date: Wed, 5 Jul 2000 16:25:19 -0700 (PDT)
Subject: Problem pquest: pquest
In-Reply-To: <200007052052.NAA27718@leland2.Stanford.EDU>
Message-ID: <Pine.GSO.4.21.0007051622420.23913-100000@fastloki.Stanford.EDU>

please shutown the machine through the CIS computer system, 
and put a warning note on the load lock.
 
Aykutlu
 
On 5 Jul 2000 rpu at snf.stanford.edu wrote:

> My wafer stuck inside the chamber. The wafer seems tilted and would not go out with the load arm.
> 
>