Problem pquest: pquest

Aykutlu Dana aykutlu at
Wed Jul 5 16:25:19 PDT 2000

please shutown the machine through the CIS computer system, 
and put a warning note on the load lock.
On 5 Jul 2000 rpu at wrote:

> My wafer stuck inside the chamber. The wafer seems tilted and would not go out with the load arm.

More information about the pquest-pcs mailing list