Problem pquest: pquest

Aykutlu Dana aykutlu at loki.stanford.edu
Wed Jul 5 16:25:19 PDT 2000


please shutown the machine through the CIS computer system, 
and put a warning note on the load lock.
 
Aykutlu
 
On 5 Jul 2000 rpu at snf.stanford.edu wrote:

> My wafer stuck inside the chamber. The wafer seems tilted and would not go out with the load arm.
> 
> 




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