From pinguet at snf.stanford.edu  Tue Nov  7 03:51:41 2000
From: pinguet at snf.stanford.edu (pinguet at snf.stanford.edu)
Date: Nov 7, 2000 3:51:41 PM
Subject: Problem pquest: pquest problem
Message-ID: <mailman.27.1357938558.25846.pquest-pcs@snf.stanford.edu>

My wafer did not come back out of the chamber after my recipe finished. I think the wafer stuck to the clamp and broke. I cannot see it in the chamber right now. 



From booth at snf.stanford.edu  Wed Nov  8 07:11:32 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 8, 2000 7:11:32 AM
Subject: Problem Clear pquest: This should have been a SHUTDOWN.
Message-ID: <mailman.28.1357938558.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Wed Nov  8 07:12:16 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 8, 2000 7:12:16 AM
Subject: Shutdown pquest: Broken wafer in etch chamber.
Message-ID: <mailman.29.1357938558.25846.pquest-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Mon Nov 20 08:22:15 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 20, 2000 8:22:15 AM
Subject: Problem pquest: Need a new public wafer carrier.
Message-ID: <mailman.30.1357938558.25846.pquest-pcs@snf.stanford.edu>

A new public wafer carrier has been provided.



From booth at snf.stanford.edu  Tue Nov 28 03:37:43 2000
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Nov 28, 2000 3:37:43 PM
Subject: Shutdown pquest: Broken wafer in etch chamber.
Message-ID: <mailman.31.1357938558.25846.pquest-pcs@snf.stanford.edu>

Matt tested the wafer transfer to check for grease or
stickyness - no problems seen, so I'm clearing this shutdown.
All users should verify correct loading by visually checking
through the view port, before starting each process.